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熱門關鍵字： 硅質原料半硅質原料高嶺土

High Precision Large-sized Ceramic Parts

作者：Keiji NAGAMORI;Hisao NAGASHIO;

作者單位：

刊名：品川技報

ISSN：0288-5395

出版年：1997-01-05

卷：0

期：40

起頁：79

止頁：82

分類號：TQ175

語種：英文

關鍵詞：

內容簡介

We have developed large-sized ceramic parts for semiconductor and LCD equipment to achieve enlargement and higher precision.Below are the research results.

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High Precision Large-sized Ceramic Parts